Development of advanced optical
Absolute Measurement
- Absolute dimensional measurement using image processing
- Signal processing of brightness values detected from the detector for boundary pixel extraction
Development of advanced optical
Height Measurement
- Interference Signal Acquisition Principle in White Light Scanning Interferometry
- Constructive interference occurs when the path difference between two optical paths 2(d2−d1) is an integer multiple of the wavelength
- In other words, constructive interference arises specifically when the distance difference between the measurement mirror (Moving Mirror) and reference mirror (Fixed Mirror) satisfies
Development of advanced optical
Spectroscopic Analysis
- Transparent film thickness measurement with spectroscopic analysis
- Measure transparent film thickness by comparing reflectivity signals as a function of wavelength (nonlinear fitting of measured and modeled signals)
Development of advanced optical
AI
- Micro-defect detection through AI-integrated high-resolution imaging and deep learning algorithms
- Inspection of surface defects for dents, scratches, microscopic debris, protrusions, etc.
- Rule-based 2D+3D simultaneous metrology
Development of advanced optical
Motion Stage Technology
- Completion of Development for Stage Moving, Gantry Moving, Conter-Mass, Multi Gantry type
- Secure diverse stage technologies for productivity enhancement