Measurement Equipment
Photo Spacer Inspection System
3D surface topography measurement using the principle of white light interferometry – step height and CD measurement of microscopic patterns
Measurement Equipment
CTQ
Module multi-functional measurement equipment
Measurement Equipment
Critical Dimension Half Tone
Simultaneous measurement of halftone and CD in the Array/TFT process to optimize process conditions such as coating amount, exposure dose, and etching amount
Measurement Equipment
SIS
Research and analysis equipment utilizing the principle of non-contact 3D surface measurement
