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Module multi-functional measurement equipment

Capable of 2D & 3D measurement

Compatible with laser profilers

High technology

High technology

  • 2D and 3D measurement capability
  • ECS, RMS, APD report function
  • Enable loading and unloading through the application of automatic tray system
Process performance

Process performance

  • Provide repeatability and accuracy that meets customer requirements
  • Improve Tact time