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(Wafer / Glass) Deposition System
Equipment capable of producing high-quality OLEDs using a vacuum-based organic and inorganic material deposition system
Source Type
Point / One nozzle / Linear
Ultra-precision alignment accuracy
High technology
- Self-developed high-precision deposition sources and sensor configurations
- Real-time monitoring system
- Automatic sensor inspection program
Process performance
- Provide substrate uniformity that meets customer requirements
- Deposition rate stability